Supersonic Pyrolysis Jets for Diamond Film Deposition
Abstract
Recent progress in the production of high-intensity supersonic free jets of hydrocarbon radicals (e.g. CH2Hn, C3Hn), has made it possible to investigate the growth mechanism of diamond and diamond-like carbon by bombardment of a substrate with a well-characterized supersonic flow of defined radicals. This report details the first phase of the project, encompassing source design, and the engineering of specific radical precursors. We have constructed and tested new higher-temperature ceramic Zirconium Oxide and Silicon Carbide pyrolysis nozzles that can operate continuously at 1700 C for several hours. The two successful designs were used to generate intense beams of hydrocarbon radicals and carbenes by thermal decomposition of appropriate precursors that were inaccessible with our previous Aluminum Oxide designs. The new nozzle design makes possible quantitative sequential homolytic cleavage of a Carbon-Bromine bond to generate a radical, or two C-Br bonds to generate a carbene. We generated a molecular beam of propadienylidene (1-C3H2) from 1,3- dibromopropyne in this fashion.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 22, 1991
- Accession Number
- ADA236035
Entities
People
- Peter Chen
Organizations
- Harvard University