Structural and Electrical Properties of Titanium-Nickel Films Deposited onto Silicon Substrates
Abstract
Thin films of the shape memory alloy NiTi have been sputter-deposited onto p-type silicon substrates. Films that are initially amorphous may be crystallized by vacuum annealing. The crystalline films exhibit the B2->B19' phase change associated with the shape memory effect while remaining in contact with the silicon substrate. Transition temperatures were determined by resistance measurements and x-ray diffraction. The NiTi-Si contacts are diodes, as evidenced by their current-voltage characteristics; however, the effect of the phase change on the barrier height could not be determined.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 20, 1991
- Accession Number
- ADA236445
Entities
People
- A. D. Johnson
- Arthur B. Ellis
- J. D. Busch
- Kathleen R. Collen