An Expert System for the Identification of Silicon Impurities Using FTIR Spectroscopy

Abstract

An expert-system for the analysis of the infra-red spectra of silicon based electronic materials has been developed. The Fourier Transform Infra-Red Spectroscopy system produces characteristic spectral lines for impurities present in silicon materials under analysis. A MicroVax workstation with a commercially available expert-system shell is attached to the spectrometer. By examining these spectral line patterns the expert-system is able to deduce the identities and concentrations of the unknown impurities. The use of this program greatly reduces the analysis time required for each sample and produces more consistent results.

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Document Details

Document Type
Technical Report
Publication Date
Apr 30, 1991
Accession Number
ADA236504

Entities

People

  • Ronald E. Perrin
  • Steven B. Fairchild

Organizations

  • Wright Laboratory

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Absorption
  • Absorption Coefficients
  • Abstracts
  • Acquisition
  • Air Force
  • Artificial Intelligence
  • Boundaries
  • Classification
  • Computers
  • Databases
  • Electronic Materials
  • Expert Systems
  • Reasoning
  • Spectra
  • Spectral Lines
  • Spectroscopy
  • Students

Readers

  • Artificial Intelligence
  • Spectroscopy.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics