MOCVD of TlBaCACuO Superconducting Thin Films: Structure - Property - Processing Relationships
Abstract
Superconducting TIBaCaCuO films were fabricated using a three step process. Amorphous BaCaCuOF films were grown on MgO(100) single crystal substrates by metalorganic chemical vapor deposition at 500 C and 4 torr using fluorinated BETA-diketonate complexes of Ba, Ca, and Cu. The fluorine was stripped in wet O2 at 785 C and c-axis oriented T12Ba2CaCu2x films were formed by annealing in dry O2 between 850 and 900 C in the presence of T1xOy vapor. The best films showed onsets of superconductivity at 125 K and zero resistivity was achieved by 109 K. Surface resistivities an order of magnitude lower than gold at 17 GHz (77 K) and J sub c s as high as 1000 A/cm sq (90 K) were obtained with unpatterned films.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 31, 1991
- Accession Number
- ADA236881
Entities
People
- Norihito Hamaguchi
- Peter S. Kirlin
- Robin A. Gardiner