MOCVD of TlBaCACuO Superconducting Thin Films: Structure - Property - Processing Relationships

Abstract

Superconducting TIBaCaCuO films were fabricated using a three step process. Amorphous BaCaCuOF films were grown on MgO(100) single crystal substrates by metalorganic chemical vapor deposition at 500 C and 4 torr using fluorinated BETA-diketonate complexes of Ba, Ca, and Cu. The fluorine was stripped in wet O2 at 785 C and c-axis oriented T12Ba2CaCu2x films were formed by annealing in dry O2 between 850 and 900 C in the presence of T1xOy vapor. The best films showed onsets of superconductivity at 125 K and zero resistivity was achieved by 109 K. Surface resistivities an order of magnitude lower than gold at 17 GHz (77 K) and J sub c s as high as 1000 A/cm sq (90 K) were obtained with unpatterned films.

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Document Details

Document Type
Technical Report
Publication Date
May 31, 1991
Accession Number
ADA236881

Entities

People

  • Norihito Hamaguchi
  • Peter S. Kirlin
  • Robin A. Gardiner

Tags

DTIC Thesaurus Topics

  • Chemical Vapor Deposition
  • Classification
  • Contracts
  • Crystals
  • Electrical Properties
  • Elements
  • Films
  • Materials
  • Military Research
  • Phase
  • Security
  • Single Crystals
  • Thin Films
  • Transitions
  • Vapor Deposition
  • X Rays
  • X-Ray Diffraction

Fields of Study

  • Physics

Readers

  • Superconducting Magnet Technology
  • Thin Film Deposition Science.