MOCVD of TlBaCACuO: Structure Property Relations and Progress Towards Device Processing
Abstract
Highly c-axis oriented Tl2Ba2CaCu2Ox thin films were grown on MgO(100) by MOCVD and post annealing processes. Resistive transition (R < or = 0.1 micro ohms-cm) of 105 K, critical current density as high as 100,000 Amps/sq cm (4 K) and surface resistivities 1/2 to 1/5 that of a gold standard at 17 GHz (77 K) were obtained with unpatterned films. Thin (0.1 microns) TlBaCaCuO films functioned as bolometers over a spectral range of 1.5 to 20 microns; no quantum or nonequilibrium effects were observed between 4 and 125 K. Fine features were delineated in the BaCaCuO thin films by wet chemical etching. After thallium incorporation, resistive transitions exceeding 103 K were observed in the patterned films.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 31, 1991
- Accession Number
- ADA236882
Entities
People
- Norihito Hamaguchi
- Peter S. Kirlin
- Robin A. Gardiner