Characterization of Plasma Polymerized Hydrocarbons Using CP-MAS Carbon- 13 NMR

Abstract

Plasma polymerized hydrocarbons made from ethane and methane were produced under different reactor conditions and probed by solid-state carbon-13 nuclear magnetic resonance (NMR) with cross-polarization and magic angle sample spinning. NMR experiments provided structural information about the plasma polymers. The conditions of low power, high hydrocarbon gas flow rate, and no added hydrogen gas appeared to give the highest amount of non-protonated sp3 hybridized carbons in the films for the reactor design used. The use of methane or ethane as reactor gas did not affect plasma polymer structure significantly.

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Document Details

Document Type
Technical Report
Publication Date
Feb 27, 1991
Accession Number
ADA236947

Entities

People

  • D. L. Cho
  • Frank D. Blum
  • H. Yasuda
  • Robert J. Gambogi

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Chemical Shifts
  • Chemical Synthesis
  • Chemistry
  • Cross Polarization
  • Films
  • Flow Rate
  • Gas Flow
  • Hydrocarbons
  • Magnetic Resonance
  • Materials
  • Military Research
  • Nuclear Magnetic Resonance
  • Organic Chemistry
  • Organic Compounds
  • Procurement
  • Resonance
  • United States

Fields of Study

  • Chemistry

Readers

  • Organic Chemistry
  • Plasma Physics.
  • Thin Film Deposition Science.