Photochemistry of Dimethyl Cadmium on Quartz and Silicon Surfaces

Abstract

The photochemistry of adsorbed dimethyl cadmium at submonolayer levels on a fused quartz and a Si(111) single crystal surface has been investigated at 193 and 248 nm using a rare-gas fluoride excimer laser. The desorbed gaseous products, which include CH2, CH3, CH4, C2H4, C2H5, C2H6, Cd, CH3Cd and (CH3)2Cd, have been detected by time-of-flight mass spectrometry by means of either electron impact or resonance-enhanced multiphoton ionization. The translational energies of these desorption products could be characterized in terms of Maxwell-Boltzmann temperatures, TMB's, which depend strongly on sample dosage (surface coverage), laser fluence, photon energy and the nature of the substrates employed. The TMB's of the C1- and C2-hydrocarbon species were found to be much lower than those of Cd, CH3Cd and (CH3)2Cd, suggesting that the electronic excitation/relaxation mechanism may be involved in the desorption of these metal/metal-containing species. A similar mechanism is not available for the desorption of the hydrocarbon products. A realistic mechanism is proposed for the UV-photochemistry of adsorbed (CH3)2Cd.

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Document Details

Document Type
Technical Report
Publication Date
Feb 26, 1991
Accession Number
ADA237261

Entities

People

  • Lin Ming-chang
  • S. P. Lee

Organizations

  • Emory University

Tags

Communities of Interest

  • Energy and Power Technologies
  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Chemical Vapor Deposition
  • Chemistry
  • Desorption
  • Detection
  • Dissociation
  • Dye Lasers
  • Electrons
  • Excimer Lasers
  • Ionization
  • Lasers
  • Liquid Dye Lasers
  • Mass Spectrometry
  • Photochemistry
  • Radiation
  • Spectra
  • Spectrometry
  • Spectroscopy

Readers

  • Electrochemical Engineering/ Fuel Cell Technologies
  • Molecular Photonics/Laser Physics
  • Thin Film Deposition Science.

Technology Areas

  • Directed Energy
  • Directed Energy - Lasers
  • Microelectronics