Growth, Characterization and Device Development in Monocrystalline Diamond Films

Abstract

Carbon has been implanted into monocrystalline (100) copper substrates. Owing to the low solubility of C in Cu, it was easily diffused to a clean Cu surface at 550 C in the form of graphite rather than the desired diamond, as shown by Auger electron spectroscopy measurements. Laser reflection interferometry has proven to be a useful technique in the study of diamond growth processes. Nucleation and growth rates were monitored in real time. The problem of surface roughness of the polycrystalline films was surmounted by growing diamond on a thin amorphous C or diamond-like film. The microwave performance of p-type diamond MESFETs operating at 10 GHz has been investigated. The moderate activation energy of the p-type dopant of B may force operation at elevated temperature. However this may result in a significantly degraded RF performance, since holes in diamond demonstrate a T to the -2.8 power temperature dependence.

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Document Details

Document Type
Technical Report
Publication Date
Jun 30, 1991
Accession Number
ADA237463

Entities

People

  • Jeffrey T Glass
  • Klaus J. Bachmann
  • R. J. Trew
  • Robert F Davis

Organizations

  • North Carolina State University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Auger Electron Spectroscopy
  • Auger Electrons
  • Ceramic Materials
  • Charge Carriers
  • Chemical Vapor Deposition
  • Electron Spectroscopy
  • Equations
  • Ion Implantation
  • Materials
  • Materials Science
  • Measurement
  • Semiconductor Devices
  • Semiconductors
  • Silicon Carbide
  • Spectra
  • Surface Roughness
  • Thin Films

Readers

  • Thin Film Deposition Science.

Technology Areas

  • Directed Energy
  • Directed Energy - Pulsed-Laser Deposition
  • Microelectronics
  • Microelectronics - Graphene