Development of a High-Resolution Low Energy Electron Diffraction System.

Abstract

Spot Profile Analysis is an efficient process used to evaluate both qualitatively and quantitatively the defect structure of crystal surfaces. The process consists of analyzing the angular distribution of a Low Energy Electron Diffraction (LEED) spot. This paper describes the design, construction, and testing of a new LEED detection system which uses a position sensitive detector. The electron optics built for this system incorporate several unique design features. These features include unipotential lenses, and the use of an easily removable electron source. Preliminary testing of the system shows transfer widths in the 300 angstrom range for electron energies from 80 to 250 eV.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1991
Accession Number
ADA239226

Entities

People

  • Brian L. Clothier

Organizations

  • Air Force Institute of Technology

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Accuracy
  • Construction
  • Control Knobs
  • Detection
  • Detectors
  • Diffraction
  • Digital Data
  • Electron Beams
  • Electron Diffraction
  • Electron Energy
  • Electron Guns
  • Electron Optics
  • Electrons
  • Field Emission
  • Geometry
  • High Resolution
  • Measurement

Fields of Study

  • Physics

Readers

  • Electronics Engineering
  • Software Engineering
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems