Laser Deposition of Cubic Boron Nitride on Electronic Materials.
Abstract
During the period July 15 through August 14, 1991, excimer laser ablation of a high purity, hexagonal boron nitride (HBN) target was continued to synthesize CBN thin films on silicon substrate; the films were characterized with SEM, Raman spectroscopy, x-ray diffraction and IR spectroscopy. Today our results indicate that the laser grown films were predominantly amorphous boron nitride rather than CBN. We had a discussion with Dr. Gary Doll and his research group (they are actively involved in growing CBN films using laser ablation) at General Motors Research Laboratory to identify the issues involved in growing CBN films. A summary of discussion and the work to be done in the next month are presented.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 12, 1991
- Accession Number
- ADA239768
Entities
People
- Arul Molian
- Madhav Rao
- P. Molian