Bimonthly Report Number 10 Detailing Work Done on Contract N00014-89-C- 2238 during June and July 1991 (Micrion Corporation).

Abstract

The production prototype column was installed on the column test stand. This is different than the original test stand in that it is the stand used to test production ready columns with production software and electronics, as well as testing column stability over time. The new electronics and operating system designed for the 0.25 um system were successfully linked to the column. The performance of the column is excellent: we can resolve 20 nm features on a test sample, and multiple users routinely use the column without arcing problems.

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Document Details

Document Type
Technical Report
Publication Date
Aug 07, 1991
Accession Number
ADA239879

Tags

Communities of Interest

  • Advanced Electronics
  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Contracts
  • Corporations
  • Costs
  • Data Transmission
  • Detectors
  • Electronics
  • Field Emission
  • Indirect Costs
  • Military Research
  • Operating Systems
  • Production
  • Test Stands
  • X Rays

Readers

  • Coastal Oceanography
  • Software Engineering
  • Technical Research and Report Writing.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems