Tunneling Acoustic Microscopy
Abstract
We have integrated silicon micromachining techniques with piezoelectric thin film deposition to make a near-field acoustic microscope. A piezoelectric zinc oxide (ZnO) transducer is deposited on a substrate of 7740 glass. A sharp tip is formed in a silicon wafer which is anodically bonded to the glass substrate. A sample is attached to substrate of glass with a receiving ZnO transducer. The transducer on the tip excites an ultrasonic beam which passes from the tip to the sample and is detected by the receiving transducer. A feedback signal is generated to keep the transmitted amplitude constant as a sample is raster scanned. The feedback signal is applied to a tube scanner and is also used to modulate the intensity of a display monitor. We find that the instrument has a vertical height sensitivity of about 20 Angstroms and a lateral resolution of better than 800 Angstroms.
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 01, 1991
- Accession Number
- ADA241547
Entities
People
- B. T. Khuri-yakub
- Calvin Quate
Organizations
- Stanford University