A Review of Positive Ion Sensitivities for the SIMS Analysis of CMT

Abstract

Measurement of the relative intensities of positive ion emission from CMT (Cadmium mercury telluride) under SIMS (Secondary Ion Mass Spectrometry) analysis provides calibration factors for the high sensitivity analysis of impurities. The Relative Sensitivity Factor (RSF) values found by RSRE, mainly from uniformly doped samples, compared well with those obtained later by other workers using implants. Theoretical models for sputtered ion emission are reviewed in detail and their applicability to the CMT data is considered, particularly in relation to plots of log (RSF) against ionisation potential. It is suggested that more than one mechanism is likely to be operative. Comparison with the results for other semiconductors suggests that the observed spread from a linear relationship might be attributable to a low implanted oxygen concentration resulting from a high sputter rate.

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Document Details

Document Type
Technical Report
Publication Date
May 01, 1991
Accession Number
ADA241596

Entities

People

  • G. W. Blackmore
  • R. Holland

Organizations

  • Royal Signals and Radar Establishment

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Alkali Metals
  • Atoms
  • Calibration
  • Chemistry
  • Elements
  • Energy Bands
  • Energy Levels
  • Equations
  • Ionization
  • Ionization Potentials
  • Kinetic Energy
  • Mass Spectrometry
  • Materials
  • Measurement
  • Metals
  • Semiconductors
  • Spectra

Readers

  • Computational Modeling and Simulation
  • Plasma Physics.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics