Infrared Rotating Analyzer Ellipsometry: Calibration and Data Processing

Abstract

The necessary relationships and a calibration procedure is presented for a rotating analyzer infrared ellipsometer that uses wire grid polarizing optics. The wire grid polarizers contribute significant ellipticity due to relatively low extinction ratios. Jones matrices are used for the quarter-wave- plate, polarizer, sample, rotating analyzer ellipsometer configuration. Results from a calibrated infrared and visible light ellipsometer for silicon dioxide films on silicon are compared.

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Document Details

Document Type
Technical Report
Publication Date
Nov 01, 1991
Accession Number
ADA242834

Entities

People

  • Eugene A. Irene
  • Min Li
  • V. A. Yakovlev

Organizations

  • University of North Carolina at Chapel Hill

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Angle Of Incidence
  • Chemistry
  • Classification
  • Crystal Structure
  • Data Processing
  • Detectors
  • Films
  • Intensity
  • Materials Science
  • Measurement
  • North Carolina
  • Numbers
  • Precision
  • Refractive Index
  • Thin Films
  • United States
  • Waveplates

Fields of Study

  • Physics

Readers

  • Computational Modeling and Simulation
  • Optical Physics and Photonics.
  • Thin Film Deposition Science.