Fusible Link Technology for Power Semiconductor Devices
Abstract
Theoretical and experimental studies were performed to investigate the feasibility for the formation of fusible links by using thin Aluminum films. The results of this research indicate that, by using the Aluminum films of 100 to 200 angstroms in thickness, it is possible to obtain links with fusing currents on the order of 10 milliamperes. These values may be acceptable for the fabrication of large area MOS-gated power devices.
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 01, 1991
- Accession Number
- ADA244110
Entities
People
- Bayant Jayant Baliga
- Prasad Venkatraman
Organizations
- North Carolina State University