Depth Profiling of Stratified Layers using Variable Angle ATR
Abstract
It is shown that variable angle attenuated total reflectance Fourier transform infrared spectroscopy is a viable technique to recover depth profile information on the molecular level. A number of controlled step profiles are measured to determine the limits of applicability for this method. Results obtained with a germanium and a KRS-5 prism are compared.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1992
- Accession Number
- ADA245022
Entities
People
- Hatsuo Ishida
- Jack L. Koenig
- Robert A. Shick
Organizations
- Case Western Reserve University