Process Issues in the Development of a Ferroelectric Capacitor/CMOS Test Chip

Abstract

Processing details are discussed in the development of a procedure to fabricate lead-zirconate-titanate (PZT) ferroelectric capacitors on a CMOS test chip for purposes of electrical and radiation characterization studies. During the course of this work, several problems were encountered in the deposition and photoengraving of the platinum electrodes that form the conducting plates of the capacitor. Both dry and wet etching techniques were employed in an effort to define the top platinum electrodes. Solutions are discussed for those problems solved during this initial development phase.

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1991
Accession Number
ADA245179

Entities

People

  • Bernard J. Rod

Organizations

  • Harry Diamond Laboratories

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Acids
  • Capacitors
  • Ceramic Materials
  • Electrodes
  • Elements
  • Etching
  • Fabrication
  • Films
  • High Temperature
  • Integrated Circuits
  • Lead Zirconate Titanates
  • Materials
  • Metals
  • Oxide Films
  • Platinum
  • Silicon Dioxide
  • Standards

Readers

  • Integrated Circuit Design and Technology.
  • Materials Science and Engineering.
  • Nanofabrication and Microfabrication.