Cadmium Telluride Thin Films on Silicon Substrates
Abstract
This report discusses the epitaxial growth of CdTe films on silicon substrates by the use of a closed hot wall epitaxy (CHWE) system. Deposition parameters were varied in order to determine the growth condition for obtaining good quality CdTe films. The characteristics of the films were investigated by scanning electron microscopy, x-ray diffraction and Auger electron spectroscopy. Experimental data show that no film grows when the source temperature is below 450 C. The film growth changes linearly with source temperature at a rate of 0. 0252 Angstrom/sec/dec C, and the best film was grown at a source temperature of 475 C. It was found that the lattice constant of the CdTe films was 6.487 + or - 0.004A.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 01, 1991
- Accession Number
- ADA245309
Entities
People
- P. G. Kornreich
- Pradipta Ghosh
- T. C. Kuo
- Y. T. Chi
Organizations
- Syracuse University