RF Vacuum Microelectronics

Abstract

Improvement in the tip fabrication process and the investigation of burn-in and test procedures have been the focus for the first three months of the contract. The process development and improvement was an extension of internally funded work for flat panel displays. The mask set used was from this work. Since the basic tip process is not the limit to high frequency operation, using this mask set let us start work immediately. A variety of problems have been overcome or alleviated. These include gate/cathode leakage, tip height relative to the gate metal, yield, and cracking at metalization crossovers.

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Document Details

Document Type
Technical Report
Publication Date
Dec 31, 1991
Accession Number
ADA246579

Entities

People

  • Alan Palevsky

Organizations

  • RTX

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Contractors
  • Contracts
  • Current Density
  • Emitters
  • Fabrication
  • Flat Panel Displays
  • Frequency
  • Ion Pumps
  • Materials
  • Microelectronics
  • Packing Density
  • Personnel Management
  • Power Supplies
  • Technical Information Centers
  • Test Stands
  • Vacuum

Readers

  • Integrated Circuit Design and Technology.
  • Materials Science (Mechanical Engineering).
  • Systems Analysis and Design

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene