Compact, Self-Contained ArF Lasers
Abstract
Key development issues associated with compact argon fluoride waveguide lasers have been investigated in a Phase I SBIR study. Average laser power of 4 milliwatts and pulse energy of 16 microjoules have been produced. Feasibility of a compact gas supply suitable for steady-state operation of the laser at very low gas flow rates has been demonstrated. Formation of dioxygen fluoride radicals in the laser gas mixture following excitation has been observed, and optical absorption by these species has been found to limit laser energy at high pulse repetition rates. Oxygen sources in the laser gas supply have been investigated.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 20, 1992
- Accession Number
- ADA247403
Entities
People
- C. P. Christensen