Silicon-On-Insulator Photonics
Abstract
The purpose of this investigation was to demonstrate a capability to integrate micro-machining techniques with SOI technology for the fabrication of optical waveguide structures that can be controlled electro-mechanically. A significant part of this effort was devoted to the experimental development of a process sequence for the fabrication of some representative structures that are described in this report. We also present, supported by modeling, a discussion of electro-mechanically induced optical effects as they relate to two particular structures: a silicon cantilever beam and a silicon bridge. Emphasis is focused on the transformation of optical waveguiding properties due to elastic deformation of these structures for purposes of switching and transduction.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 1991
- Accession Number
- ADA247957
Entities
People
- Andrew L. Robinson
- Russell Watts
Organizations
- Georgia Tech