The In situ Observation of Diamond Film Nucleation and Growth

Abstract

The growth of a two-dimensional ordered carbon monolayer on Mo(100) has been observed under conditions approaching those used for diamond CVD using a photoelectron emission microscope. The method used is a combination of HFCVD and atomic layer epitaxy, using a strongly chemisorbed oxygen layer as a nucleation inhibitor. Site-for-site place exchange of carbon for oxygen, that preserves the surface ordering, has been observed. Extension of this technique to surfaces that are templates for diamond epitaxy is being investigated. CVD diamond, Nucleation, Emission microscopy, In situ microscopy.

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Document Details

Document Type
Technical Report
Publication Date
Mar 20, 1992
Accession Number
ADA248203

Entities

People

  • Martin E Kordesch

Organizations

  • Ohio University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Atomic Layer Epitaxy
  • Chemical Vapor Deposition
  • Crystals
  • Diamond Films
  • Electron Emission
  • Electronic Mail
  • Electrons
  • Emission
  • Epitaxial Growth
  • Films
  • Materials
  • Microscopes
  • Photoelectric Emission
  • Photoelectrons
  • Photoexcitation
  • Three Dimensional
  • Two Dimensional

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene