Physics and Technology of III-V Pseudomorphic Structures
Abstract
We have developed an in situ technique for determining the group-V composition in gas-source molecular beam epitaxy (GSMBE) growth of mixed group-V compounds, such as GaAsP, InAsP, and InGaAsP. The in situ technique consists of monitoring the intensity oscillations of group-V-induced reflection high-energy electron diffraction (RHEED). We have grown high-quality InAsP/InP strained- layer superlattices with exciton emission at 1.06, 1.3, or 1.55 microns, suitable for long-wavelength modulator applications. We have also explored the capability of GSMBE by investigating low-temperature-growth InP and p-type carbon doping in In0.5Ga0.5As and In0.5Ga0.5P.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 01, 1991
- Accession Number
- ADA248330
Entities
People
- C. W. Tu
Organizations
- University of California, San Diego