Materials Processing of Diamond: Etching, Doping by Ion Implantation and Contact Formation

Abstract

A summary of work achieved under this grant is given, including ion implantation doping of natural diamond, annealing of implantation damage, characterization methods, contact formation using a sputtering method, and plasma etching.

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Document Details

Document Type
Technical Report
Publication Date
Mar 31, 1992
Accession Number
ADA248447

Entities

People

  • Max L. Swanson

Organizations

  • University of North Carolina at Chapel Hill

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Abstracts
  • Annealing
  • Chemical Engineering
  • Chemical Vapor Deposition
  • Crystals
  • Diamond Films
  • Electronic Mail
  • Heat Of Activation
  • High Temperature
  • Implantation
  • Ion Implantation
  • Ions
  • Low Temperature
  • Materials
  • Materials Processing
  • Materials Science
  • Optical Absorption

Readers

  • Semiconductor Device Technology