Field-Emitter Arrays for RF Vacuum Microelectronics
Abstract
Two development areas required immediate attention. The first was to find a suitable material and then develop an anode that can be used in close proximity to the cathode without causing difficulties due to outgassing and arcing. The second was to design and fabricate a cathode structure with an interelectrode capacitance consistent with the microwave applications envisioned. In addition, work has begun on improving emitter-dp geometry and packing density with a view toward minimizing driving voltage requirements. Finally, we have started development of a test vehicle for characterizing the cathodes at microwave frequencies. The microwave measurements will be made using a Hewlett-Packard 8510B network analyzer. The plan has been to research these issues in parallel. The cathode characterization and anode materials (and processing) issues were studied using our well-established cathode arrays fabricated on silicon substrates. Easy-to-build, low-frequency, triode configurations fabricated on standard TO-5 headers were used as the test vehicles. The low-capacitance cathode structure for high-frequency work is being studied using small-area cathode structures formed on dielectric (fused quartz) substrates, and a microwave test vehicle is being designed and built.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 13, 1992
- Accession Number
- ADA248896
Entities
Organizations
- SRI International