Monolithic Integration of Semiconductor and Superconductor Components
Abstract
The goal of the program is to develop transistor technology compatible with high transition temperature superconductor technology so that transistor pixel switches can be integrated with YBa2Cu3O7 superconducting microbolometers in the same silicon substrate. A 4x4 matrix-addressable superconducting microbolometer array will be delivered at the completion of the program. The linear arrays of microbolometers produced in the Honeywell funded process run of December 1991 were evaluated under the present contract during January - March 1992. The results, summarized in this report, demonstrate that high - Tc superconductor microbolometers on silicon microstructures are extremely sensitive infrared detectors.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 31, 1992
- Accession Number
- ADA248952
Entities
People
- Burgess Johnson
Organizations
- Honeywell International, Inc.