Synthesis of Diamond Films with Pulsed Plasma
Abstract
Diamond films were grown in plasmas formed with microwaves that were modulated with a pulsed generator. Films obtained with the use of pulse periods in the nanosecond, microsecond, and millisecond ranges were compared to baseline films which were obtained with a CW plasma. The deposited films were examined with SEM, XRD and Micro-Raman spectroscopy. For the experimental conditions used, the diamond films' growth rates and quality improved with increasing pulse duration while maintaining a duty cycle at nearly 50 percent, and reached a maximum with CW generated films. This was attributed primarily to an increasing degree of supersaturation of atomic hydrogen at the growth surface with increasing pulse time. diamond technology.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 01, 1992
- Accession Number
- ADA250058
Entities
People
- D. Brock
- M. Aklufi
Organizations
- Naval Command, Control and Ocean Surveillance Center