Field-Emitter Arrays for RF Vacuum Microelectronics
Abstract
This report covers the first quarter of a program to develop field-emitter arrays for vacuum micro-electronics. The goals of the effort are 5 mA total current at 5 A/cm2 for at least 1 h, and demonstrated modulation of the emission at 1 GHz. Efforts for this period have been directed toward developing a suitable anode structure for this application, designing a low-capacitance cathode structure capable of being driven at GHz frequencies, and designing test apparatus for operation of the cathodes in the GHz range (microstrip lines, etc.). The results of the development to date are that 1000-tip cathodes have been operated with carefully processed, close-spaced nickel anodes at 15 mA and 23 A/cm2 for over 1000 h. In addition, low-capacitance cathode structures have been fabricated, and although there have been some difficulties with dielectric depositions, one cathode has been tested with very encouraging results. A low- capacitance 625-tip linear array with a 4-um x 1.25-mm, electrode area has been tested at up to 25 mA total current at 1000 A/cM2 with a 5% duty cycle and modulated at 20 MHz (the limit of the function generator available at the time of the experiment). Field-emitter array, vacuum microelectronics, low- capacitance cathode.
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 01, 1992
- Accession Number
- ADA250101
Entities
People
- A. Rosengreen
- C. A. Spindt
Organizations
- SRI International