Tunneling Acoustic Microscopy.
Abstract
We have microfabricated an integrated 1 GHz ultrasonic transducer and sharp silicon tip for use as a scanning near-field acoustic microscope probe. The silicon tip, which has a 500 A radius of curvature, is microfabricated using a batch fabrication process compatible with integrated circuit manufacturing techniques. The ZnO ultrasonic transducer is integrally fabricated at the base of the tip to allow sound waves to be transmitted longitudinally down the tip. The microscope is configured such that the tip is brought into close proximity of a sample which has a receiving acoustic transducer. Two-dimensional imaging is accomplished by raster scanning the tip over the sample while feeding back on the total transmitted acoustic power to keep the tip/sample separation constant.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 01, 1992
- Accession Number
- ADA251028
Entities
People
- B. T. Khuri-yakub
- Calvin Quate
Organizations
- Stanford University