A Kinetic Mechanism for the Transformation of Single Layer Steps into Double Layer Steps by Si Deposition on a Vicinal Si(100) Surface

Abstract

We perform energy calculations with the Stillinger-Weber potential to determine: (a) how the Si atoms depositions on a Si(100) surface with single layer steps migrate to produce a surface with double layer steps; and (b) why the system does not evolve by the usual step flow mechanism.

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Document Details

Document Type
Technical Report
Publication Date
May 15, 1992
Accession Number
ADA252059

Entities

People

  • H. Metiu
  • Yao Lu
  • Zhicai Zhang

Organizations

  • University of California, Santa Barbara

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