MBE Grown Copper-Aluminum Alloy Films

Abstract

This document reports on the design and construction of a Molecular Beam Epitaxy system to grow and characterize aluminum/copper films, for electromigration studies. The growth of Al/Cu films in an evaporation system and reduction of the oxygen content of these films is discussed. Also, a novel approach to the modeling of electromigration in circuit metallization is presented.

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Document Details

Document Type
Technical Report
Publication Date
May 01, 1992
Accession Number
ADA252486

Entities

People

  • Philipp Kornreich

Organizations

  • Syracuse University

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors

DTIC Thesaurus Topics

  • Air Force
  • Aluminum
  • Aluminum Alloys
  • Computational Science
  • Construction
  • Current Density
  • Electric Fields
  • Elements
  • Equations
  • Evaporation
  • Field Effect Transistors
  • Materials
  • Metal Films
  • Metals
  • Molecular Beam Epitaxy
  • Molecular Beams
  • Vacuum Chambers

Fields of Study

  • Materials science

Readers

  • Software Engineering.
  • Thin Film Deposition Science.