Beam Technologies for Integrated Processing

Abstract

Beam technologies offer opportunities for application in many manufacturing schemes. Various beam technologies are reviewed, and applications to electronics and engineered materials are identified. Examples of existing manufacturing processes are described. Recommendations for R and D efforts are developed for enhancing the understanding of the operation and capabilities of beam technologies and their applications.

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Document Details

Document Type
Technical Report
Publication Date
Mar 01, 1992
Accession Number
ADA252647

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Ceramic Materials
  • Chemical Synthesis
  • Chemical Vapor Deposition
  • Chemistry
  • Engineered Materials
  • Manufacturing
  • Material Degradation Processes
  • Materials
  • Materials Engineering
  • Materials Laboratories
  • Materials Processing
  • Materials Science

Fields of Study

  • Engineering
  • Physics

Readers

  • Defense Technology Research and Development.
  • Plasma Physics / Magnetohydrodynamics
  • Systems Analysis and Design

Technology Areas

  • Microelectronics