Beam Technologies for Integrated Processing
Abstract
Beam technologies offer opportunities for application in many manufacturing schemes. Various beam technologies are reviewed, and applications to electronics and engineered materials are identified. Examples of existing manufacturing processes are described. Recommendations for R and D efforts are developed for enhancing the understanding of the operation and capabilities of beam technologies and their applications.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 01, 1992
- Accession Number
- ADA252647