Isotopically Enriched (28)Si Crystal for Electronics Applications

Abstract

We have designed and fabricated the sample holder for thermal conductivity measurements of the Si (28) epitaxial films. We have designed and fabricated the mask set for making the test structures on the Si(28) epitaxial wafers. We have fabricated some test structures on regular Si epitaxial wafers, and preliminary experiments are underway to measure the thermal conductivity of these samples.

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Document Details

Document Type
Technical Report
Publication Date
Jun 20, 1992
Accession Number
ADA252776

Entities

People

  • Tso-ping Ma

Organizations

  • Yale University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Availability
  • Conductivity
  • Connecticut
  • Contracts
  • Electrical Engineering
  • Electronic Mail
  • Electronics
  • Engineering
  • Materials
  • Measurement
  • Thermal Conductivity
  • Universities
  • Virginia

Readers

  • Materials Science
  • Materials Science and Engineering.
  • Microwave Engineering.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems