Hydrocarbon Surface Chemistry on Si(100)
Abstract
The interaction of various hydrocarbon species with the Si(l00) surface has been investigated using several surface science techniques. The efficiency of carbon deposition is related to the efficiency of SiC thin film formation. The hydrocarbon species studied include acetylene (C2H2), ethylene (C2H4), and the adsorbed methyl group (CH3(a)). In the case of the chemisorption of acetylene and ethylene, the pi-bond of the olefinic molecules interacts with the dimer unit (Si2) on the Si(100)-(2xl) surface. one monolayer of both acetylene and ethylene on Si(100) has been achieved by saturating the surface at 105 K, and a di-sigma bonding structure is proposed for one molecule per Si2 dimer unit at monolayer coverage. Upon heating, the majority (> 95 %) of the adsorbed acetylene undergoes dissociation to produce chemisorbed carbon and H2(g). In contrast, chemisorbed ethylene desorbs intact from Si(l00) at - 550 K, with approximately 2 % of the monolayer undergoing dissociation. The low activation energy for desorption (Ed deg (C2H4)= 38 kcal mol-1) allows C2H4 to desorb prior to significant decomposition.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1992
- Accession Number
- ADA252803
Entities
People
- C. C. Cheng
- H. Gutleben
- J. T. Yates Jr.
- M. L. Clemen
- M. L. Colaianni
- P. A. Taylor
- P. J. Chen
- R. M. Wallace
- W. H. Weinberg
- Wolfgang J. Wolfgang J. Choyke
Organizations
- University of Pittsburgh