Langmuir Probe and Optical Emission Studies of Ar, O2 and N2 Plasmas Produced by an ECR Microwave Source
Abstract
An understanding of electron cyclotron resonance microwave plasma discharges requires the measurement of plasma parameters. In argon, nitrogen and oxygen plasmas, cylindrical Langmuir probes were used to determine the variations Of plasma parameters (ion density, Ni , floating potential, Vf, plasma potential, Vp, and electron temperature, Te) with applied power (100-300 W) and pressures (1-10x10(-4) Torr). Simultaneous optical emission (OE) spectra were also obtained, and, using knowledge of excited and neutral peak intensities and transition energies, the electron temperatures were calculated. By the use of the Langmuir probe electron temperature results, the electron temperatures obtained from OE resulted in scaling factors, C, of 2 eV- .75, .15 eV-.7b, and 2 eV-.75 for argon, oxygen, and nitrogen, respectively.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 13, 1992
- Accession Number
- ADA253138
Entities
People
- A. A. Shatas
- Eugene A. Irene
- Y. Z. Hu
Organizations
- University of North Carolina at Chapel Hill