Novel Charge Integrating Pulsed I(V) Technique: A Measurement of Fowler- Nordheim Currents through Thin SiO2 Films
Abstract
The design, characterization and applications of a novel charge integrating pulsed current-voltage I(V) measurement are described. Tunneling transport through thin metal-oxide-semiconductor (MOS) capacitors is measured over ten orders of magnitude of current. Short pulse widths (<l us), allow electrical characterization of these films under high current densities, without significant charge injection. A study of the quantum interference of electrons during Fowler-Nordheim (FN) conduction, is used to illustrate the measurement.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 13, 1992
- Accession Number
- ADA253144
Entities
People
- Eugene A. Irene
- J. C. Polar
- W. S. Woodward
Organizations
- University of North Carolina at Chapel Hill