Damage Modes and Mechanisms of Si-Ge Films under Prompt Soft X-Ray Radiation
Abstract
Thermal and residual stresses in films exposed to sudden temperature changes are analyzed based on an elastoplastic-brittle idealization of film response. The results thus obtained are used to explain qualitatively the damage mechanisms of various failure modes observed iii Si-Ge film deposited on a single crystal Si substrate exposed to soft x-ray radiation for a short duration of time.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 13, 1992
- Accession Number
- ADA253383
Entities
People
- Dick J. Chang
- Rokuro Muki
- Sandra R. Gyetvay
Organizations
- The Aerospace Corporation