Field-Emitter Arrays for RF Vacuum Microelectronics
Abstract
SRI International has completed the third quarter of a program to develop field-emitter arrays or vacuum microelectronics. The goals of the effort are 5 mA total current at 5 A/cm2 for at least 1 hour, and demonstrated modulation of the emission at 1 GHz. PECVD of silicon dioxide films with uniform thickness over a 5-inch-diameter wafer was compared with sputter deposition. Gate aperture holes of 0.8 micrometer diameter were successfully printed and etched. Emission tests on sets of 1000-tip cathodes achieved 7514 hours of operation (4964 hours at 15 mA) with nickel plate anodes. Mounting apparatus and microstrip lines were completed, and a test vehicle was designed, for microwave measurements for high-frequency testing of low-capacitance cathode structures. Investigations continued on geometry of the close-spaced anode, and simulated electron trajectories show that primary electrons are collected. Under a new program task to develop a bright light source, preliminary tests were made on a water-cooled phosphor using a standard field-emitter amy.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1992
- Accession Number
- ADA253397
Entities
People
- A. Rosengreen
- C. A. Spindt
Organizations
- University of Rhode Island