Quantum Well Wires and Boxes Superstructures: Microprocessing and Characterization
Abstract
The research was aimed at producing quantum wire superlattices with dimensions below 10nm by directly using molecular beam epitaxy. Two(2D) and three dimensional (3D) carrier confinement is achievable relatively easily when the confinement length scale is larger than 100 nm. This is the dimensional range of the so called mesoscopic devices. All the technologies which permit this mesoscopic regime are based on lithography (electrons or ions) processing which will be used for producing a depletion layer or a lateral band gap modulation with a strain field. Unfortunately the interesting effects associated with the presence of a superlattice and quantization are not found until the structure dimensions are well below the 50nm range. There are presently few processing techniques which will permit reaching these dimensions.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 14, 1991
- Accession Number
- ADA253435
Entities
People
- P. M . Petroff
Organizations
- University of California, Santa Barbara