RF Vacuum Microelectronics

Abstract

We summarize our third quarter progress towards developing a thin film edge emitter vacuum triode capable of 1 GHz modulation at current emission densities of 10 uA/um for 1 hour. Considerable progress in the development of a good edge emitter has been achieved this quarter. Current densities of >5 uA/um have been measured and continuous operation of a field emitter diode for >70 hours has been achieved. Design of field emitter triodes were completed this quarter and processing of these triodes has commenced. Atomic force microscopy was used to characterize the emitter surfaces and finite-element modeling of the triode was carried out.

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Document Details

Document Type
Technical Report
Publication Date
Jul 24, 1992
Accession Number
ADA253488

Entities

People

  • D. K. Arch

Organizations

  • Honeywell International, Inc.

Tags

DTIC Thesaurus Topics

  • Current Density
  • Current Limiters
  • Dielectric Films
  • Dielectrics
  • Emission
  • Emitters
  • Fabrication
  • Field Emission
  • Films
  • Materials
  • Materials Processing
  • Measurement
  • Microelectronics
  • Microscopy
  • Oxide Films
  • Resistors
  • Thin Films

Fields of Study

  • Materials science
  • Physics

Readers

  • Space/Atmospheric Physics.
  • Technical Research and Report Writing.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene