Epitaxial Magnetic Oxides
Abstract
Research was carried out on the heteroepitaxial growth of magnetic oxides (garnets and hexaferrites) on a variety of substrates. These new materials technologies are being used for the development of novel microwave, millimeter wave and optical signal processing devices. Liquid phase epitaxy (LPE) sputtering and pyrolysis (thermal decomposition of spin coated material) have been used to grow these materials. For integrated microwave and optical signal processing devices, two-layer LPE grown garnets with one layer having a narrow resonance linewidth (<l Oe) and the other a high Faraday rotation (>O.l deg/um) have been developed. Silicon-on-garnet technology was developed and demonstrated capable of producing high quality integrated semiconductor and magnetic devices on a common substrate. Sputter deposition and pyrolysis were developed as alternative lower temperature processes capable of depositing garnets onto nongarnet substrates, and thin film hexaferrites with near-bulk values of magnetization and uniaxial anisotropy were grown by sputter deposition. garnets, hexaferrites, microwave materials, ring, millimeter wave materials, magneto-optical materials, sputtering-liquid phase epitaxy.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 30, 1992
- Accession Number
- ADA253667
Entities
People
- A. Zeltser
- D. D. Stancil
- D. E. Laughlin
- D. J. Rogers
- J. Peruyero
- M. H. Kryder
- M. Ramesh
- P. H. L. Rasky
- S. Silliman
- W Wang
- W. Eppler
- X. Sui
Organizations
- Carnegie Mellon University