Resonant Membrane Spatial Light Modulators
Abstract
Incorporating an aluminum layer to allow for contacting the arrays resulted in the generation of residual materials which compromised structures. Attempts to resolve the problem using alternate etch chemistries and protective layers were unsuccessful. A previously discarded wet etch approach was revisited and has produced structures. First attempts at driving the devices revealed shorts apparently due to sidewall deposition of aluminium during the primary deposition. This can be overcome by optimizing position during the evaporation, and adding an oxygen plasma step to insulate any exposed aluminum.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1992
- Accession Number
- ADA253893
Entities
People
- Mark W. Miles