RF Vacuum Microelectronics

Abstract

VHF micro-triode (cylindrical) wafers were started. Design for planar triode was completed, and masks were received. Planar triode wafers were started. VHF test parts for planar diode were designed and ordered. New evaporator parts were received and final assembly started. Moly tips were improved with 'double evaporation'. 25 microA/tip emission from 100 tip array was achieved. Control and yield on silicon tips was improved. Work function was lowered by 'metalization of tips'. Mask was designed to be compatible with Raytheon test stand.

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Document Details

Document Type
Technical Report
Publication Date
Jul 24, 1992
Accession Number
ADA253910

Entities

Organizations

  • RTX

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Acquisition
  • Assembly
  • Backward Diodes
  • Contracts
  • Diodes
  • Electronics
  • Emitters
  • Evaporation
  • Evaporators
  • Frequency
  • Life Tests
  • Materials
  • Metals
  • Microelectronics
  • Test Stands
  • Work Functions

Readers

  • Electronics Engineering
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems