Multidimensional Deterministic Electron Transport Calculations

Abstract

Fast and accurate techniques for determining electron fluxes and energy deposition profile in complex multidimensional microcircuits have been developed. The multidimensional Spencer-Lewis Transport equation is solved deterministically using several special numerical techniques. We begin with the derivation of the Spencer-Lewis equation. Then we discuss SMART scattering theory that enables us to replace the highly anisotropic electron scattering kernal by one that is more amenable to numerical treatment. Next, we describe several transport and diffusion theory solution algorithms. Finally, we present new analytical benchmarking methods that will prove useful in generating more comprehensive benchmarks.

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Document Details

Document Type
Technical Report
Publication Date
May 01, 1992
Accession Number
ADA254021

Entities

People

  • B. D. Ganapol
  • S. P. Monahan
  • W. L. Filippone

Organizations

  • University of Arizona

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Algorithms
  • Boltzmann Equation
  • Boundaries
  • Collisions
  • Delta Functions
  • Diffusion Theory
  • Electron Density
  • Electron Flux
  • Electron Scattering
  • Electrons
  • Equations
  • Geometry
  • Materials
  • Parallel Computing
  • Scattering
  • Three Dimensional
  • Two Dimensional

Readers

  • Calculus or Mathematical Analysis
  • Computational Modeling and Simulation
  • Computer Networking

Technology Areas

  • Microelectronics