Theoretical Development for Depth Profiling of Stratified Layers Using Variable Angle ATR
Abstract
The theory allowing depth profile information to be recovered from variable angle attenuated total reflection spectroscopy is shown for both perpendicular and parallel polarizations. The errors invoked by the necessary approximations are evaluated by comparison with exact optical simulations using dispersion theory.
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 11, 1992
- Accession Number
- ADA255571
Entities
People
- Hatsuo Ishida
- Jack L. Koenig
- Robert A. Shick
Organizations
- Case Western Reserve University