Advanced Laser Chemical Processing For Microelectronics and Integrated Optics
Abstract
This report summarizes a three-year research effort to explore advanced laser-chemical processing for microelectronics and integrated optics. The main goals of the work have been: (a) to develop techniques for fabrication of integrated optical devices in GaAs multilayer and quantum well structures, and (b) to explore new and novel techniques of advanced semiconductor processing for microelectronics and optoelectronics.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 15, 1992
- Accession Number
- ADA255980
Entities
People
- Richard M. Osgood, Jr.
- Robert Scarmozzino
Organizations
- Columbia University