Advanced Laser Chemical Processing For Microelectronics and Integrated Optics

Abstract

This report summarizes a three-year research effort to explore advanced laser-chemical processing for microelectronics and integrated optics. The main goals of the work have been: (a) to develop techniques for fabrication of integrated optical devices in GaAs multilayer and quantum well structures, and (b) to explore new and novel techniques of advanced semiconductor processing for microelectronics and optoelectronics.

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Document Details

Document Type
Technical Report
Publication Date
Aug 15, 1992
Accession Number
ADA255980

Entities

People

  • Richard M. Osgood, Jr.
  • Robert Scarmozzino

Organizations

  • Columbia University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Advanced Materials
  • Electro-Optic Modulators
  • Electronics Industry
  • Electronics Laboratories
  • Excimer Lasers
  • Fabrication
  • Lasers
  • Materials
  • Materials Processing
  • Optics
  • Optoelectronic Devices
  • Optoelectronics
  • Power Electronics
  • Quantum Wells
  • Schottky Diodes
  • Semiconductors
  • Ultraviolet Lasers

Readers

  • Integrated Circuit Design and Technology.
  • Technical Research and Report Writing.

Technology Areas

  • Directed Energy
  • Microelectronics
  • Quantum Computing