Temperature Measurements with Micrometer Spatial Resolution

Abstract

A novel technique has been developed to measure temperatures with a spatial resolution less than 10 um. This method uses the temperature-sensitive time decay fluorescence of a phosphor as a surface sensor. The spatial resolution is obtained by using an electron beam to excite individual phosphor grains deposited on the surface of interest. ne phosphor selected for its dynamic range and chemical stability is the inorganic compound magnesium fluorogermanate activated with manganese. The time decay constant of its fluorescence decreases monotonically with temperature between -200 to 450 deg C. This method was verified on a cross-sectioned Zener diode. A description of the technique and a temperature map of the sectioned area of an operating diode are presented.

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Document Details

Document Type
Technical Report
Publication Date
Jul 24, 1992
Accession Number
ADA256463

Entities

People

  • F. Izaguirre
  • G. Csanky
  • G. F. Hawkins

Organizations

  • The Aerospace Corporation

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies
  • Weapons Technologies

DTIC Thesaurus Topics

  • Classification
  • Corporations
  • Diodes
  • Electron Beams
  • Electronic Components
  • Electrons
  • Failure Mode And Effect Analysis
  • Fluorescence
  • Luminescence
  • Measurement
  • Phosphors
  • Security
  • Semiconductor Devices
  • Semiconductors
  • Thermal Conductivity
  • Thermal Resistance
  • Zener Diodes

Fields of Study

  • Physics

Readers

  • Materials Science and Engineering.
  • Optical Physics and Photonics.
  • Thermal Physics or Thermal Science.

Technology Areas

  • Directed Energy
  • Directed Energy - Lasers
  • Microelectronics