SAW Chemosensor. Third Progress Report (SAW Chemosensor. De derde Voortgangsrapportage)

Abstract

At the Prins Maurits Laboratory TNO, work on surface acoustic wave (SAW) chemical sensors is being performed. Up to now the main subjects have been: implementation of SAW technology on a silicon chip, the development of a SAW sensor for NO2 and the development of a SAW sensor for chemical warfare agents. This third progress report deals with the on-going work on a SAW sensor for NO2 including immobilization of the chemical interface, silicon-based SAW sensors for NO2 with and without the application of silicon nitride passivation layers, preliminary results of the development of a SAW sensor for CO2 and a chapter dealing with an automated SAW testing system developed at TNO-PML. Most of the chapters have been published in the literature.

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Document Details

Document Type
Technical Report
Publication Date
Feb 01, 1992
Accession Number
ADA256487

Entities

People

  • M. S. Nieuwenhuizen

Organizations

  • Prins Maurits Laboratorium TNO

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors

DTIC Thesaurus Topics

  • Acoustic Propagation
  • Acoustic Waves
  • Acoustics
  • Carbon Dioxide
  • Ceramic Materials
  • Chemical Compounds
  • Chemical Detectors
  • Chemical Warfare
  • Chemical Warfare Agents
  • Detection
  • Detectors
  • Materials
  • Measurement
  • Nitrogen Oxides
  • Surface Acoustic Waves
  • Transducers
  • Warning Systems

Readers

  • Marine Propulsion Engineering and Naval Architecture
  • Semiconductor Device Technology
  • Technical Research and Report Writing.