Field-Emitter Arrays for RF Vacuum Microelectronics.

Abstract

SRI International has completed the fourth quarter of a program to develop field-emitter arrays for vacuum microelectronics. The goals of the effort are 5 mA at 5 A/cm2 for at least 2 hours, and demonstrated modulation of the emission at 1 GHz. In-house technology was defined for the fabrication of low-frequency cathode structures on glass substrates. Fabrication and assembly of the apparatus required for microwave testing of the high-frequency cathode geometry was completed. Very-low-voltage cathode operation was demonstrated by fabricating cathode arrays using an experimental technique to produce gate apertures with 0.5-micrometer diameters. Current/voltage tests of high-frequency cathodes qualified them for testing in a microwave testing apparatus. A field-emission microscope was fabricated and assembled for use in basic surface studies with the potential of developing cathode processing techniques that will maximize emission stability and uniformity over an array. In bright light source research, 76,000 footlamberts was demonstrated with a standard P-53 phosphor and standard Spindt-type emitter array.

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Document Details

Document Type
Technical Report
Publication Date
Nov 01, 1992
Accession Number
ADA258211

Entities

People

  • A. Rosengreen
  • C. A. Spindt
  • P. R. Schwoebel

Organizations

  • SRI International

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Chemical Vapor Deposition
  • Chemistry
  • Electron Emission
  • Electronics
  • Electronics Laboratories
  • Emission
  • Emitters
  • Fabrication
  • Field Emission
  • Frequency
  • Geometry
  • Glow Discharges
  • Light Sources
  • Low Voltage
  • Materials
  • Measurement
  • Standards

Fields of Study

  • Physics

Readers

  • Electronics Engineering
  • Integrated Circuit Design and Technology.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems