Cation Production and Reactions Induced by Electron Impact on Tetraethoxysilane

Abstract

The production of cations by electron impact on tetraethoxysilane (TEOS) is studied with a Fourier Transform mass spectrometer (FTMS). The operating principles of FTMS are reviewed and the experimental,approach to the mass calibration and cross-section measurement is discussed. The cross-sections for total and partial ionization of Si(OC2H5) from threshold to 50 eV are measured. Also, the ion chemistry resulting from interactions between ions and neutral TEOS is examined.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1992
Accession Number
ADA258830

Entities

People

  • Jeremy C. Holtgrave

Organizations

  • Air Force Institute of Technology

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Air Force
  • Calibration
  • Charged Particles
  • Chemical Vapor Deposition
  • Chemistry
  • Data Acquisition
  • Electron Energy
  • Electrons
  • Ion Traps
  • Isotopes
  • Mass Spectra
  • Mass Spectrometers
  • Mass Spectrometry
  • Measurement
  • Pressure Measurement
  • Spectrometry
  • Waveforms

Readers

  • Molecular Photonics/Laser Physics
  • Surface Coatings Technology.

Technology Areas

  • Microelectronics